IJPEM
Design and Testing of a new 3-DOF Spatial
Parallel Flexure Micropositioning Stage
Xiaozhi Zhang and Qingsong Xu
- This paper presents the design and testing of a novel 3-DOF parallel flexure micropositioning stage for micro-scale operations. The
proposed modular design can obtain the merit of high interchangeability during maintenance process. The output platform of the
mechanism offers pure translational motion along X, Y, and Z axes by resorting to the flexure guiding of two parallelogram joints.
Meanwhile, the output motion is decoupled by using two leaves with symmetric ellipse-shaped flexure hinges, and the platform
provides isolated movement without parasitic motion. By using the bridge-type and lever-type compound amplifier, the
micropositioning stage provides a large output displacement, which is over 30 times the input displacement provided by piezoelectric
actuator. The enlarged displacement is translated to the orthogonal parallel mechanism by four straight beams, which provide perfect
decoupling properties. In addition, the modular design principle makes it possible to adopt multiple materials to balance the
performance of the actuator and decoupling flexure hinges. Analytical analysis and finite element analysis simulation are conducted
to verify the fine decoupling property and large translational motion of the proposed 3-DOF parallel micropositioning stage.
Moreover, a prototype is fabricated using multiple materials for experimental testing. Results demonstrate the promising performance
of the developed decoupled micropositioning stage.
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